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SPMS V3 Series

Semiconductor Engineering & Software Solutions

SPMS V3 Series
(SESO Particle Monitoring System Version 3)
 
Determining high quality of every processed manufactured products in semiconductor, environment, pharmaceutical or biological industry is
to maintain satisfied class as detecting and removing any particles existing in internal workshop. Therefore, it is a critical issue to set a clean
room of manufacturing advanced high quality products or devices.
In the typical manufacturing environment, 24 hours particle monitor of clean room is required to get products and devices you want. So, our 
particle counter should be used to the first monitoring system to detect how many particles are existing inside of equipment, ambient air in the
factory. Direct imaging particle detecting employs the use of serial or Ethernet interface so our particle counter determines the real time data.
Also, an embedded memory device in our particle counter reserves the existing data in case of connection disruption.
 
Model SPMS-V3
Size range 0.5 um(# or Class selectable)
Sensitivity 100 % for particles > 0.45 um(per ISO 21501-4 and JIS)
Zero count level <1 count / 5 minutes(<2 particles / ft³) (per ISO 21501-4 and JIS)
Flow rate 0.1 CFM(2.83 LPM)
± 5 % accuracy(ISO 21501-4 and JIS B9921)
Light source Laser Diode Class 1 per EN60825
Display LCD
Network interface Ethernet, Bluetooth, Serial(RS-485, 422), 4 - 20 mA
Calibration NIST traceable using SESO calibration system
Calibration interval One year or less(ISO 21801-4)
Data Storage 60 minutes
Power Power-over-Ethernet(PoE compliant with IEEE 802.3af), 24 VDC
Operating condition -10 ℃ to 60 ℃ / 20 % to 65 % (non-condensing)
Storage condition -10 ℃ to 75 ℃ / Up to 90 % (non-condensing)
Temperature & Humidity
(Optional)		 T : -40~120 ℃(±0.3 ℃)
H : 0~100 %(±2.0 %)
 
SPMS-V3