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Wafer Sensor Master

Precision Wireless Measurement Device

ALVMD(Advanced Leveling & Vibration Measurement Device)
 
컨텐츠 이미지
 
Wafer Sensor Master” by SESO are Bluetooth enabled, wafer-shaped precision measurement devices that measure Vibration, Level,
and Gap in real-time, with measurements made in the wafer moving position. Optimized equipment set-up is achieved by checking robot and
wafer process positions inside the equipment, and supports optimized set-up. It’s now possible to check and verify the progress of PM and
BM in real time!
ALVMD (Advanced Level Vibration Measurement Device) is a wafer-shaped precision level & vibration measurement sensor,
combining the functions of both AVMD and ALMD. Level and Vibration data are measured in real time.
 
The ALVMD is designed with a thickness of under 3.5mm to enable Auto Process and Auto Transfer in all sections
of the latest semiconductor equipment.
ALVMD is designed with a weight of 150g, similar to the actual wafer weight to prevent robot arm deflection.
It’s possible to measure vibration in wafer handling, robot moving and in wafer process position.
It is possible to check the moving level of the robot arm (Extend, Retract) The level positions of critical process areas within
the equipment can now be checked and verified in real time
 
컨텐츠이미지 DataSheet
 
Hardware Housing Size 300(±0.05)mm
Housing Material Carbon Fiber
Weight 150g
Thickness 3.5(+0.3/-0.2)mm
Operating Pressure <10e^-6 to 760Torr
Operating Temperature 20~60℃
Battery >3hours per charge
Level SENSOR Accuracy Absolute X, Y ±0.03° within ±7°
Measurement Units degree,milliradian, mm/d, mm/r
Vibration Sensor Measurement Units G, gal(Earth gravity units)
Range ±2G(Default)
Resolution ±0.01G
Data sampling 1ms(1000data per second)
Frequency FFT Analysis within 200Hz(Selectable 200Hz, 500Hz)
Software Level Type View : Real-time Level check, Auto mark function
Review : Replay Log File , Auto report function
Vibration Type View: Real-Time Vibration, Frequency check, Auto
           mark function
Review: Replay Log File, Auto report function.
Operating System Windows 7, 8, 10
Others Wireless Link Module Bluetooth, Class1, 2.4GHz
Product Components ALVMD Sensor, Charging case, Link module, USB cable Charging cable, Software, Carrying case
Calibration Manufacturer recalibration(annually)