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Wafer Sensor Master

Precision Wireless Measurement Device

컨텐츠 이미지
 
“Wafer Sensor Master” by SESO are Bluetooth enabled, wafer-shaped precision measurement devices that measure Vibration, Level,
and Gap in real-time, with measurements made in the wafer moving position. Optimized equipment set-up is achieved by checking robot and
wafer process positions inside the equipment, and supports optimized set-up. It’s now possible to check and verify the progress of PM and
BM in real time!
 
  • 컨텐츠 이미지
    AVMD
    Vibration
  • 컨텐츠 이미지
    ALMD
    Level
  • 컨텐츠 이미지
    ALVMD
    Level & Vibration
  • 컨텐츠 이미지
    AGMD
    Gapping