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Wafer Sensor Master

Precision Wireless Measurement Device

AVMD(Advanced Vibration Measurement Device)
 
컨텐츠 이미지
 
“Wafer Sensor Master” by SESO are Bluetooth enabled, wafer-shaped precision measurement devices that measure Vibration, Level,
and Gap in real-time, with measurements made in the wafer moving position. Optimized equipment set-up is achieved by checking robot and
wafer process positions inside the equipment, and supports optimized set-up. It’s now possible to check and verify the progress of PM and
BM in real time!
 
AVMD (Advanced Vibration Measurement Device) is a wafer-shaped precision vibration measurement sensor that expresses
the stress received by the wafer inside the equipment as vibration data through a 3-axis acceleration sensor.
Vibration data measured in real time can be checked to determine normal state or not.
- AVMD is designed with a thickness of under 3.5mm to enable Auto Process and Auto Transfer in all sections
of the latest generation of semiconductor tools.
- The AVMD is designed with a weight of 150g, similar to the actual wafer weight to prevent robot arm deflection.
- It’s possible to measure vibration in the wafer handling, and the robot movement in wafer process position.
 
컨텐츠이미지 DataSheet
 
Hardware Housing Size 300(±0.05)mm
Housing Material Carbon Fiber
Weight 150g
Thickness 3.5(+0.3/-0.2)mm
Operating Pressure <10e^-6 to 760Torr
Operating Temperature 20~60℃
Battery >3hours per charge
Vibration Sensor Measurement Units G, gal(Earth gravity units)
Range ±2G(Default)
Resolution ±0.01G
Data sampling 1ms(1000data per second)
Frequency FFT Analysis within 200Hz(Selectable 200Hz, 500Hz)
Software Type View: Real-Time Vibration, Frequency check, Auto
           mark function
Review : Replay Log File, Auto report function.
Operating System Windows 7, 8, 10
Others Wireless Link Module Bluetooth, Class1, 2.4GHz
Product Components AVMD Sensor, Charging case, Link module, USB cable Charging cable, Software, Carrying case
Calibration Manufacturer recalibration(annually)